Tokki's organic material and cathode metal material deposition expertise, which is ideally suited to mass production, stems from 30 years of experience and a proven track record in the field of vacuum evaporation equipment. Our fully automated encapsulation system is based on robotics and precision machine technologies that make full use of 35 years of factory automation system experience. Our high-precision alignment mechanisms and control technology are indispensible for the production of full-color OLED pixels. This fully automated mass production system fuses all of these technologies in a single system.

Film Deposition Cluster #1

1. A clean robot installed outside the cluster automatically transfers glass substrates (with ITO) to the cluster.
2. Pre-treatment cleaning of substrates
3 to 5. Evaporation of stacked organic layers followed by transfer of substrates to Deposition Cluster #2
6. Air is released only from the loading chamber, and the tray is ejected
Only Loading chamber is vented back to atmospheric pressure for tray exchange.

Film Deposition Cluster #2

7 to 9. Evaporation of stacked organic layers
10. The full-color deposition step is completed with metal cathode deposition, followed by the transfer of substrates to the encapsulation cluster, after which the cluster enters standby mode.

Automated Encapsulation Glass Supply Line

Automated supply of encapsulation glass → UV cleaning → Adhesive dispensing → Attachment of desiccant → Degassing followed by automated transport to encapsulation cluster

Encapsulation Cluster

11. Encapsulation glass provided with desiccant and adhesive is transported to the encapsulation chamber in an N2 gas atmosphere maintained at a low temperature by controlling the dew point where they are pressed onto the glass substrates, followed by adhesion and encapsulation by UV irradiation.
12. Finished glass substrates on which the encapsulation process has been completed are automatically unloaded to a storage stocker by the robot installed outside the cluster to complete the integrated continuous production process.

• Stable deposition is realized through the use of our proprietary cell-type evaporation source and control of the vapor deposition rate.
• Improved operating efficiency is realized through the stocking of vapor deposition material, the automated supply of cathode metal material, and the automated replacement of metal masks.
• Deposition demonstrates superior uniformity and reproducibility.
• Stable encapsulation is realized through the use of an automated encapsulation glass supply line and a fully automated encapsulation mechanism.
• High-precision alignment is realized through the use of a proprietary alignment mechanism and a control system using a CCD camera.
• A long life span and stable device production have been realized by integrating the deposition and encapsulation processes.

• The mass production of OLED display panels

Glass Substrates	370 x 470mm, substrate rotating speed maximum of 15 rpm ITO patterned glass substrates (PM)/TFT patterned glass substrates (AM)
Exhaust	Deposition process: 10－5Pa level Encapsulation process: Low vacuum close to atmospheric pressure, N2 maintained at low temperature by control of the dew point
Deposition	Organic material: Heater-controlled evaporation point source, thickness uniformity: ±5％ Metal material: THP or EB evaporation source, thickness uniformity: ±7％
Encapsulation	Positioning of glass substrates and encapsulation glass aligned to within ±50μm with a CCD camera
Control	Automated operation by controlling transport, exhaust, deposition, and encapsulation conditions based on computer and sequencer settings
Mask Alignment	Positioning of glass substrates and metal masks is aligned to within ±5μm with a CCD camera