Home > Our Products > OLED Display Manufacturing Equipment > Equipment for Small to Medium Volume Production
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This system includes equipment that is ideal for everything from basic research and development to small volume production of OLED displays. All processes, from O2 plasma cleaning to deposition and encapsulation, are performed in a single system. Since the deposited film surface never comes into contact with the atmosphere, it is possible to create high-performance OLED devices without dark spots.
Highly reproducible processing makes efficient device process development possible, all the way up to the transition to mass production.
- Small and medium volume production of OLED display panels
| Glass Substrates | 200 x 200 mm, with an effective deposition area of 160 x 160 mm |
|---|---|
| Load Lock Chamber | One substrate and two masks in a three-stage elevation mechanism |
| Plasma Cleaning Chamber | RF plasma power supply , O2 mass flow controller |
| Deposition Chamber #1 | Low-temperature cell evaporation source (8 pieces)、 CCD alignment mechanism ±5 μm |
| Deposition Chamber #2 | Low-resistance heating evaporation source (4 pieces)、CCD alignment mechanism ±5 μm |
| Delivery Chamber | Glass substrate delivery mechanism, N2 gas line |
| Encapsulation Chamber | Semi-automatic laminating mechanism, UV lamp unit, Gas purifier, N2 distribution unit |
| Pass Box | Exhaust: fully automatic Deposition: semi-automatic operation Encapsulation: semi-automatic operation |
| Control System | Substrate delivery: semi-automatic operation with film thickness control through crystal deposition control |
| Options | Deposition chamber, sputter chamber, or CVD chamber addition; electron gun evaporation source, high-temperature cell, oxygen meter, dry pump |
Contact Us
Please use the contact information below or the Contact Us form to send us your support related inquiries.
Please note that the time required for us to send a response will depend on the details of your inquiry.
- Tokki Corporation Sales Department
- Hatchobori 2-chome 21-2, Chuo-ku, Tokyo 104-0032
Telephone: +81-3-3551-3151 / Fax: +81-3-3551-3164
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