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| Standard System Overview | Basic Specifications | Contact Us |
This equipment is ideal for material development and process development evaluation. This compact system integrates the 02 plasma cleaning chamber, organic emitting layer deposition chamber, metal electrode deposition chamber, and encapsulation chamber, which makes it possible to create OLED device prototypes without dark spots because there is no contact with the air from vapor deposition to encapsulation. Highly reproducible trial prototypes for research and development applications such as material evaluation and process evaluation make basic research on OLED devices efficient.
- Prototyping and testing OLED display panels
| Glass Substrates | 100 x 100 mm, with an effective deposition area of 82 x 90 mm |
|---|---|
| Plasma Cleaning Chamber | RF plasma power supply, O2 mass flow controller |
| Deposition Chamber #1 | Low-temperature cell evaporation source (8 pieces) , Pin mask positioning mechanism ±0.1 mm |
| Deposition Chamber #2 | Low-resistance heating evaporation source (4 pieces) , Pin mask positioning mechanism ±0.1 mm |
| Delivery Chamber | Substrate delivery mechanism, N2 Gas line |
| Encapsulation Chamber | Manual laminating mechanism, UV lamp unit, Gas purifier |
| Control System | Exhaust: fully automatic Deposition: semi-automatic operation Encapsulation: manual operation Film thickness control through crystal monitor sensor deposition control |
| Options | Electron Beam gun evaporation source, high-temperature cell, oxygen meter, dry pump |
Contact Us
Please use the contact information below or the Contact Us form to send us your support related inquiries.
Please note that the time required for us to send a response will depend on the details of your inquiry.
- Tokki Corporation Sales Department
- Hatchobori 2-chome 21-2, Chuo-ku, Tokyo 104-0032
Telephone: +81-3-3551-3151 / Fax: +81-3-3551-3164
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