Clean and Flat ITO Substrates

OLED displays are now being mass produced in countries around the world, and the production of high definition color displays has begun in recent years.
In order to achieve an excellent level of device reliability and a high yield, the ITO electrode surface condition must be optimized. Still, the traditional brushing method of cleaning has been limited.
This equipment utilizes a soft polishing method that makes it possible to remove residue and particles from bumps as well, while improving ITO electrode surface roughness at the same time.

• Smoothing of ITO substrates, etc.
• Others

• Substrate surface polishing with special polishing tape and slurry
• In addition to glass substrate cleaning, smoothing cleaning of the ITO film and metal film surface is also possible
• Improved removal of particles and residue, which can cause dark spots and leakage current, and improved surface roughness are possible

* Details will vary depending on the application and specifications. For details, please contact us as described below.