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Tokki's CVD equipment is great for a wide range of applications, from OLEDs to semiconductors and photovoltaic cells.
This PE-CVD equipment was developed for low-temperature deposition of gas barrier film such as silicon nitride for large glass substrates.
By installing this on OLED manufacturing equipment, it is possible to conduct continuous deposition of barrier film in a vacuum after organic layer deposition.
Depending on the application, either CCD alignment or mechanical alignment can be selected for the mask alignment, to enable highly precise PE-CVD deposition.
This equipment can also be used as standalone PE-CVD equipment.
In addition to OLED displays, this can also be used as various PE-CVD equipment types, for the manufacturing of LCD TFTs, semiconductors, photovoltaic cells, and so on.
- Metal mask-through deposition is possible
- Low-temperature deposition at 80° C or lower is possible
- Up to Gen-4 Glass substrate sizes are supported
- Both face-down and face-up deposition methods can be supported
- OLED displays
- Organic semiconductors
- Photovoltaic cells
- Others
| Model | 1st Generation | 2nd Generation | 3rd Generation | 4th Generation |
|---|---|---|---|---|
| Supported Sizes | 200 x 200 mm | 360 x 460 mm | 550 x 650 mm | 730 x 920 mm |
| - | 325 x 550 mm | 600 x 720 mm | - | |
| Deposition Films | SIN, SINO, SION, SIO | |||
| Radio Frequencies | 13.56 MHz and 27.12 MHz | |||
| Deposition Rate | 200 to 300 nm/min |
200 to 300 nm/min |
150 to 250 nm/min |
150 to 250 nm/min |
| Thickness unif. Within substrate | ±5％ | ±7％ | ±10％ | ±10％ |
| Thickness unif. between substrate | ±5％ | ±7％ | ±10％ | ±10％ |
| Cleaning rate | 200 to 300 nm/min or faster | |||
Contact Us
Please use the contact information below or the Contact Us form to send us your support related inquiries.
Please note that the time required for us to send a response will depend on the details of your inquiry.
- Tokki Corporation Sales Department
- Hatchobori 2-chome 21-2, Chuo-ku, Tokyo 104-0032
Telephone: +81-3-3551-3151 / Fax: +81-3-3551-3164
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