Tokki's sputtering system is ideal for the mass production of compact electronic parts, from crystal devices to chip resistors.

Electronic parts have been growing more and more compact each year, and production equipment must also become even more efficient.
The "SPS-402" carousel-type sputtering system makes efficient production possible while saving space. Cost is also reduced due to the fact that it has much fewer parts than inline-type equipment.
A two-layer target can be installed, with uniform continuous deposition of stacked layers.
The construction is simple, which makes maintenance easy.

• Saves space and low-cost
• Excellent film thickness uniformity due to the high-speed carousel rotation
• Easy carrier insertion/removal and target replacement
• Two different types of laminated film deposition are possible
• An automatic reversal mechanism makes deposition possible on both surfaces of the substrates in the batch

• Crystal devices, chip resistors, electronic parts, others

* This will vary depending on the application and specifications. Please contact us at the address below for details.

Tokki has developed a wide range of inline-type sputtering system to meet our customers' various needs.
This "SPL-V Series" of inline-type sputtering system supports everything from compact substrates for electronic parts to large glass substrates for OLED displays, thin-film photovoltaic cells, and so on.
By incorporating this equipment into an advanced automated production line, it is possible to maximize the productivity of your production line with Tokki's 35 years of design expertise in the field of automation systems.

• Highly flexible equipment design
• Support for complete automation
• Stable long-term operation
• Support for a wide range of substrates, from compact substrates to large glass substrates

Magnetic recording media, electronic parts, crystal base coatings, next-generation photovoltaic cell manufacturing equipment, others

* This will vary depending on the application and specifications. Please contact us at the address below for details.

Tokki aggressively customizes equipment to support customer needs. The sputtering equipment shown on this Web page only represents a few examples of what we can do. Tokki can satisfy your needs with a large number of equipment lines in addition to those shown above.